EFFICIENCY ENHANCEMENT OF MONTE-CARLO SIMULATION OF PARTICLE-BEAM INTERACTION BY SEPARATION OF STOCHASTIC AND CONTINUUM CONTRIBUTIONS

Authors
GROVES TR
Citation
Tr. Groves, EFFICIENCY ENHANCEMENT OF MONTE-CARLO SIMULATION OF PARTICLE-BEAM INTERACTION BY SEPARATION OF STOCHASTIC AND CONTINUUM CONTRIBUTIONS, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(6), 1994, pp. 3483-3488
Citations number
11
Categorie Soggetti
Physics, Applied
Journal title
Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena → ACNP
ISSN journal
10711023
Volume
12
Issue
6
Year of publication
1994
Pages
3483 - 3488
Database
ISI
SICI code
1071-1023(1994)12:6<3483:EEOMSO>2.0.ZU;2-5