ELECTRON-ELECTRON SCATTERING IN MICROCOLUMNS

Authors
THOMSON MGR
Citation
Mgr. Thomson, ELECTRON-ELECTRON SCATTERING IN MICROCOLUMNS, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(6), 1994, pp. 3498-3502
Citations number
13
Categorie Soggetti
Physics, Applied
Journal title
Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena → ACNP
ISSN journal
10711023
Volume
12
Issue
6
Year of publication
1994
Pages
3498 - 3502
Database
ISI
SICI code
1071-1023(1994)12:6<3498:ESIM>2.0.ZU;2-O