AN ANALYTICAL MODEL OF STOCHASTIC INTERACTION EFFECTS IN PROJECTION SYSTEMS USING A NEAREST-NEIGHBOR APPROACH

Authors
MKRTCHYAN MM LIDDLE JA BERGER SD HARRIOTT LR SCHWARTZ AM GIBSON JM
Citation
Mm. Mkrtchyan et al., AN ANALYTICAL MODEL OF STOCHASTIC INTERACTION EFFECTS IN PROJECTION SYSTEMS USING A NEAREST-NEIGHBOR APPROACH, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(6), 1994, pp. 3508-3512
Citations number
6
Categorie Soggetti
Physics, Applied
Journal title
Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena → ACNP
ISSN journal
10711023
Volume
12
Issue
6
Year of publication
1994
Pages
3508 - 3512
Database
ISI
SICI code
1071-1023(1994)12:6<3508:AAMOSI>2.0.ZU;2-G