MINIMUM FEATURE SIZES AND ION-BEAM PROFILE FOR A FOCUSED ION-BEAM SYSTEM WITH POST-OBJECTIVE LENS RETARDING AND ACCELERATION MODE

Authors
KIESLICH A REITHMAIER JP FORCHEL A
Citation
A. Kieslich et al., MINIMUM FEATURE SIZES AND ION-BEAM PROFILE FOR A FOCUSED ION-BEAM SYSTEM WITH POST-OBJECTIVE LENS RETARDING AND ACCELERATION MODE, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(6), 1994, pp. 3518-3522
Citations number
16
Categorie Soggetti
Physics, Applied
Journal title
Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena → ACNP
ISSN journal
10711023
Volume
12
Issue
6
Year of publication
1994
Pages
3518 - 3522
Database
ISI
SICI code
1071-1023(1994)12:6<3518:MFSAIP>2.0.ZU;2-B