FORCE PROBE CHARACTERIZATION USING SILICON 3-DIMENSIONAL STRUCTURES FORMED BY FOCUSED ION-BEAM LITHOGRAPHY

Authors
EDENFELD KM JARAUSCH KF STARK TJ GRIFFIS DP RUSSELL PE
Citation
Km. Edenfeld et al., FORCE PROBE CHARACTERIZATION USING SILICON 3-DIMENSIONAL STRUCTURES FORMED BY FOCUSED ION-BEAM LITHOGRAPHY, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(6), 1994, pp. 3571-3575
Citations number
19
Categorie Soggetti
Physics, Applied
Journal title
Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena → ACNP
ISSN journal
10711023
Volume
12
Issue
6
Year of publication
1994
Pages
3571 - 3575
Database
ISI
SICI code
1071-1023(1994)12:6<3571:FPCUS3>2.0.ZU;2-Q