YAW COMPENSATION FOR AN ELECTRON-BEAM LITHOGRAPHY SYSTEM

Authors
INNES R
Citation
R. Innes, YAW COMPENSATION FOR AN ELECTRON-BEAM LITHOGRAPHY SYSTEM, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(6), 1994, pp. 3580-3584
Citations number
1
Categorie Soggetti
Physics, Applied
Journal title
Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena → ACNP
ISSN journal
10711023
Volume
12
Issue
6
Year of publication
1994
Pages
3580 - 3584
Database
ISI
SICI code
1071-1023(1994)12:6<3580:YCFAEL>2.0.ZU;2-O