NANOMETER-SCALE DIMENSIONAL METROLOGY FOR ADVANCED LITHOGRAPHY

Authors
MARCHMAN HM GRIFFITH JE GUO JZY FRACKOVIAK J CELLER GK
Citation
Hm. Marchman et al., NANOMETER-SCALE DIMENSIONAL METROLOGY FOR ADVANCED LITHOGRAPHY, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(6), 1994, pp. 3585-3590
Citations number
10
Categorie Soggetti
Physics, Applied
Journal title
Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena → ACNP
ISSN journal
10711023
Volume
12
Issue
6
Year of publication
1994
Pages
3585 - 3590
Database
ISI
SICI code
1071-1023(1994)12:6<3585:NDMFAL>2.0.ZU;2-9