DIFFRACTIVE TECHNIQUES FOR LITHOGRAPHIC PROCESS MONITORING AND CONTROL

Authors
NAQVI SSH ZAIDI SH BRUECK SRJ MCNEIL JR
Citation
Ssh. Naqvi et al., DIFFRACTIVE TECHNIQUES FOR LITHOGRAPHIC PROCESS MONITORING AND CONTROL, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(6), 1994, pp. 3600-3606
Citations number
64
Categorie Soggetti
Physics, Applied
Journal title
Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena → ACNP
ISSN journal
10711023
Volume
12
Issue
6
Year of publication
1994
Pages
3600 - 3606
Database
ISI
SICI code
1071-1023(1994)12:6<3600:DTFLPM>2.0.ZU;2-7