FABRICATION OF NANOSTRUCTURES IN ALGASB INAS USING ELECTRON-BEAM LITHOGRAPHY AND CHEMICALLY ASSISTED ION-BEAM ETCHING

Authors
ARAFA M YOUTSEY C GRUNDBACHER R ADESIDA I KLEM J
Citation
M. Arafa et al., FABRICATION OF NANOSTRUCTURES IN ALGASB INAS USING ELECTRON-BEAM LITHOGRAPHY AND CHEMICALLY ASSISTED ION-BEAM ETCHING, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(6), 1994, pp. 3623-3625
Citations number
4
Categorie Soggetti
Physics, Applied
Journal title
Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena → ACNP
ISSN journal
10711023
Volume
12
Issue
6
Year of publication
1994
Pages
3623 - 3625
Database
ISI
SICI code
1071-1023(1994)12:6<3623:FONIAI>2.0.ZU;2-2