WRITING STRATEGIES OF CIRCULAR GRATINGS FOR SURFACE-EMITTING LASERS USING FOCUSED ION-BEAM (X-Y COORDINATE) AND ELECTRON-BEAM (POLAR COORDINATE) LITHOGRAPHY

Authors
FALLAHI M TEMPLETON IM CHATENOUD F CHAMPION G DION M BARBER R
Citation
M. Fallahi et al., WRITING STRATEGIES OF CIRCULAR GRATINGS FOR SURFACE-EMITTING LASERS USING FOCUSED ION-BEAM (X-Y COORDINATE) AND ELECTRON-BEAM (POLAR COORDINATE) LITHOGRAPHY, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(6), 1994, pp. 3626-3630
Citations number
8
Categorie Soggetti
Physics, Applied
Journal title
Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena → ACNP
ISSN journal
10711023
Volume
12
Issue
6
Year of publication
1994
Pages
3626 - 3630
Database
ISI
SICI code
1071-1023(1994)12:6<3626:WSOCGF>2.0.ZU;2-R