15 NANOMETER FEATURES BY SIDEWALL PROCESSING AND PATTERN TRANSFER

Authors
RANDALL JN NEWELL BL
Citation
Jn. Randall et Bl. Newell, 15 NANOMETER FEATURES BY SIDEWALL PROCESSING AND PATTERN TRANSFER, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(6), 1994, pp. 3631-3634
Citations number
10
Categorie Soggetti
Physics, Applied
Journal title
Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena → ACNP
ISSN journal
10711023
Volume
12
Issue
6
Year of publication
1994
Pages
3631 - 3634
Database
ISI
SICI code
1071-1023(1994)12:6<3631:1NFBSP>2.0.ZU;2-8