PATTERNING A 50-NM PERIOD GRATING USING SOFT-X-RAY SPATIAL-FREQUENCY MULTIPLICATION

Authors
WEI M ATTWOOD DT GUSTAFSON TK ANDERSON EH
Citation
M. Wei et al., PATTERNING A 50-NM PERIOD GRATING USING SOFT-X-RAY SPATIAL-FREQUENCY MULTIPLICATION, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(6), 1994, pp. 3648-3652
Citations number
18
Categorie Soggetti
Physics, Applied
Journal title
Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena → ACNP
ISSN journal
10711023
Volume
12
Issue
6
Year of publication
1994
Pages
3648 - 3652
Database
ISI
SICI code
1071-1023(1994)12:6<3648:PA5PGU>2.0.ZU;2-F