PROGRESS IN MASK TECHNOLOGY FOR ION-IMPLANTATION BASED NANOFABRICATION

Authors
BURKARD M GRIESINGER UA MENSCHIG A SCHWEIZER H KLEIN H BOHM G TRANKLE G WEIMANN G
Citation
M. Burkard et al., PROGRESS IN MASK TECHNOLOGY FOR ION-IMPLANTATION BASED NANOFABRICATION, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(6), 1994, pp. 3677-3680
Citations number
12
Categorie Soggetti
Physics, Applied
Journal title
Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena → ACNP
ISSN journal
10711023
Volume
12
Issue
6
Year of publication
1994
Pages
3677 - 3680
Database
ISI
SICI code
1071-1023(1994)12:6<3677:PIMTFI>2.0.ZU;2-S