FABRICATION OF ARRAYS OF NANOMETER-SIZE TEST STRUCTURES FOR SCANNING PROBE MICROSCOPE TIPS CHARACTERIZATION

Authors
BOGDANOV AL ERTS D NILSSON B OLIN H
Citation
Al. Bogdanov et al., FABRICATION OF ARRAYS OF NANOMETER-SIZE TEST STRUCTURES FOR SCANNING PROBE MICROSCOPE TIPS CHARACTERIZATION, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(6), 1994, pp. 3681-3684
Citations number
20
Categorie Soggetti
Physics, Applied
Journal title
Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena → ACNP
ISSN journal
10711023
Volume
12
Issue
6
Year of publication
1994
Pages
3681 - 3684
Database
ISI
SICI code
1071-1023(1994)12:6<3681:FOAONT>2.0.ZU;2-9