ELECTRON-BEAM FABRICATION AND FOCUSED ION-BEAM INSPECTION OF SUBMICRON STRUCTURED DIFFRACTIVE OPTICAL-ELEMENTS

Authors
DIX C MCKEE PF THURLOW AR TOWERS JR WOOD DC DAWES NJ WHITNEY JT
Citation
C. Dix et al., ELECTRON-BEAM FABRICATION AND FOCUSED ION-BEAM INSPECTION OF SUBMICRON STRUCTURED DIFFRACTIVE OPTICAL-ELEMENTS, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(6), 1994, pp. 3708-3711
Citations number
10
Categorie Soggetti
Physics, Applied
Journal title
Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena → ACNP
ISSN journal
10711023
Volume
12
Issue
6
Year of publication
1994
Pages
3708 - 3711
Database
ISI
SICI code
1071-1023(1994)12:6<3708:EFAFII>2.0.ZU;2-7