ATOMIC DESORPTION AND READSORPTION OF CHLORINE ON A SI(111) 7X7 SURFACE WITH A SCANNING TUNNELING MICROSCOPE

Authors
BABA M MATSUI S
Citation
M. Baba et S. Matsui, ATOMIC DESORPTION AND READSORPTION OF CHLORINE ON A SI(111) 7X7 SURFACE WITH A SCANNING TUNNELING MICROSCOPE, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(6), 1994, pp. 3716-3719
Citations number
18
Categorie Soggetti
Physics, Applied
Journal title
Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena → ACNP
ISSN journal
10711023
Volume
12
Issue
6
Year of publication
1994
Pages
3716 - 3719
Database
ISI
SICI code
1071-1023(1994)12:6<3716:ADAROC>2.0.ZU;2-T