PROXIMAL PROBE STUDY OF SELF-ASSEMBLED MONOLAYER RESIST MATERIALS

Authors
PERKINS FK DOBISZ EA BRANDOW SL KOLOSKI TS CALVERT JM RHEE KW KOSAKOWSKI JE MARRIAN CRK
Citation
Fk. Perkins et al., PROXIMAL PROBE STUDY OF SELF-ASSEMBLED MONOLAYER RESIST MATERIALS, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(6), 1994, pp. 3725-3730
Citations number
32
Categorie Soggetti
Physics, Applied
Journal title
Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena → ACNP
ISSN journal
10711023
Volume
12
Issue
6
Year of publication
1994
Pages
3725 - 3730
Database
ISI
SICI code
1071-1023(1994)12:6<3725:PPSOSM>2.0.ZU;2-7