NANOMETER-SCALE PATTERNING AND OXIDATION OF SILICON SURFACES WITH AN ULTRAHIGH-VACUUM SCANNING TUNNELING MICROSCOPE

Authors
LYDING JW ABELN GC SHEN TC WANG C TUCKER JR
Citation
Jw. Lyding et al., NANOMETER-SCALE PATTERNING AND OXIDATION OF SILICON SURFACES WITH AN ULTRAHIGH-VACUUM SCANNING TUNNELING MICROSCOPE, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(6), 1994, pp. 3735-3740
Citations number
21
Categorie Soggetti
Physics, Applied
Journal title
Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena → ACNP
ISSN journal
10711023
Volume
12
Issue
6
Year of publication
1994
Pages
3735 - 3740
Database
ISI
SICI code
1071-1023(1994)12:6<3735:NPAOOS>2.0.ZU;2-A