SPATIAL-PHASE-LOCKED ELECTRON-BEAM LITHOGRAPHY AND X-RAY-LITHOGRAPHY FABRICATING FIRST-ORDER GRATINGS ON RIB WAVE-GUIDES

Authors
WONG VV FERRERA J DAMASK JN CARTER JM MOON EE HAUS HA SMITH HI RISHTON S
Citation
Vv. Wong et al., SPATIAL-PHASE-LOCKED ELECTRON-BEAM LITHOGRAPHY AND X-RAY-LITHOGRAPHY FABRICATING FIRST-ORDER GRATINGS ON RIB WAVE-GUIDES, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(6), 1994, pp. 3741-3745
Citations number
15
Categorie Soggetti
Physics, Applied
Journal title
Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena → ACNP
ISSN journal
10711023
Volume
12
Issue
6
Year of publication
1994
Pages
3741 - 3745
Database
ISI
SICI code
1071-1023(1994)12:6<3741:SELAXF>2.0.ZU;2-Q