NANOSTRUCTURE FABRICATION AND THE SCIENCE USING FOCUSED ION-BEAMS

Authors
FUJISAWA T BEVER T HIRAYAMA Y TARUCHA S
Citation
T. Fujisawa et al., NANOSTRUCTURE FABRICATION AND THE SCIENCE USING FOCUSED ION-BEAMS, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(6), 1994, pp. 3755-3759
Citations number
15
Categorie Soggetti
Physics, Applied
Journal title
Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena → ACNP
ISSN journal
10711023
Volume
12
Issue
6
Year of publication
1994
Pages
3755 - 3759
Database
ISI
SICI code
1071-1023(1994)12:6<3755:NFATSU>2.0.ZU;2-9