DEFOCUS ASYMMETRY IN PROJECTION PRINTING

Authors
BAROUCH E HOLLERBACH U ORSZAG SA
Citation
E. Barouch et al., DEFOCUS ASYMMETRY IN PROJECTION PRINTING, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(6), 1994, pp. 3778-3782
Citations number
8
Categorie Soggetti
Physics, Applied
Journal title
Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena → ACNP
ISSN journal
10711023
Volume
12
Issue
6
Year of publication
1994
Pages
3778 - 3782
Database
ISI
SICI code
1071-1023(1994)12:6<3778:DAIPP>2.0.ZU;2-I