PRACTICAL PHASE-SHIFTING MASK TECHNOLOGY FOR 0.3 MU-M LARGE-SCALE INTEGRATIONS

Authors
MIZUNO F MORIUCHI N HOGA M KOIZUMI Y SUGA O NAKAUNE H KAMIYAMA K HASEGAWA N MURAI F ITOH F
Citation
F. Mizuno et al., PRACTICAL PHASE-SHIFTING MASK TECHNOLOGY FOR 0.3 MU-M LARGE-SCALE INTEGRATIONS, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(6), 1994, pp. 3799-3803
Citations number
6
Categorie Soggetti
Physics, Applied
Journal title
Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena → ACNP
ISSN journal
10711023
Volume
12
Issue
6
Year of publication
1994
Pages
3799 - 3803
Database
ISI
SICI code
1071-1023(1994)12:6<3799:PPMTF0>2.0.ZU;2-F