QUARTER-MICRON LITHOGRAPHY WITH A GAPPED MARKLE-DYSON SYSTEM

Authors
OWEN G BORKHOLDER D KNORR C MARKLE DA PEASE RFW
Citation
G. Owen et al., QUARTER-MICRON LITHOGRAPHY WITH A GAPPED MARKLE-DYSON SYSTEM, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(6), 1994, pp. 3809-3813
Citations number
5
Categorie Soggetti
Physics, Applied
Journal title
Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena → ACNP
ISSN journal
10711023
Volume
12
Issue
6
Year of publication
1994
Pages
3809 - 3813
Database
ISI
SICI code
1071-1023(1994)12:6<3809:QLWAGM>2.0.ZU;2-W