50-NM X-RAY-LITHOGRAPHY USING SYNCHROTRON-RADIATION

Authors
CHEN Y KUPKA RK ROUSSEAUX F CARCENAC F DECANINI D RAVET MF LAUNOIS H
Citation
Y. Chen et al., 50-NM X-RAY-LITHOGRAPHY USING SYNCHROTRON-RADIATION, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(6), 1994, pp. 3959-3964
Citations number
13
Categorie Soggetti
Physics, Applied
Journal title
Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena → ACNP
ISSN journal
10711023
Volume
12
Issue
6
Year of publication
1994
Pages
3959 - 3964
Database
ISI
SICI code
1071-1023(1994)12:6<3959:5XUS>2.0.ZU;2-V