PRINTABILITY OF SUB-150 NM FEATURES IN X-RAY-LITHOGRAPHY - THEORY ANDEXPERIMENTS

Authors
HECTOR SD WONG VV SMITH HI MCCORD MA RHEE KW
Citation
Sd. Hector et al., PRINTABILITY OF SUB-150 NM FEATURES IN X-RAY-LITHOGRAPHY - THEORY ANDEXPERIMENTS, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(6), 1994, pp. 3965-3969
Citations number
17
Categorie Soggetti
Physics, Applied
Journal title
Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena → ACNP
ISSN journal
10711023
Volume
12
Issue
6
Year of publication
1994
Pages
3965 - 3969
Database
ISI
SICI code
1071-1023(1994)12:6<3965:POSNFI>2.0.ZU;2-O