HIGH-PERFORMANCE MULTILEVEL BLAZED X-RAY MICROSCOPY FRESNEL ZONE PLATES - FABRICATED USING X-RAY-LITHOGRAPHY

Authors
DIFABRIZIO E GENTILI M GRELLA L BACIOCCHI M KRASNOPEROVA A CERRINA F YUN W LAI B GLUSKIN E
Citation
E. Difabrizio et al., HIGH-PERFORMANCE MULTILEVEL BLAZED X-RAY MICROSCOPY FRESNEL ZONE PLATES - FABRICATED USING X-RAY-LITHOGRAPHY, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(6), 1994, pp. 3979-3985
Citations number
10
Categorie Soggetti
Physics, Applied
Journal title
Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena → ACNP
ISSN journal
10711023
Volume
12
Issue
6
Year of publication
1994
Pages
3979 - 3985
Database
ISI
SICI code
1071-1023(1994)12:6<3979:HMBXMF>2.0.ZU;2-K