PARAMETRIC MODELING AT RESIST-SUBSTRATE INTERFACES

Authors
OCOLA LE CERRINA F
Citation
Le. Ocola et F. Cerrina, PARAMETRIC MODELING AT RESIST-SUBSTRATE INTERFACES, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(6), 1994, pp. 3986-3989
Citations number
13
Categorie Soggetti
Physics, Applied
Journal title
Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena → ACNP
ISSN journal
10711023
Volume
12
Issue
6
Year of publication
1994
Pages
3986 - 3989
Database
ISI
SICI code
1071-1023(1994)12:6<3986:PMARI>2.0.ZU;2-C