SPUTTERING OF FIBROUS-STRUCTURED LOW-STRESS TA FILMS FOR X-RAY MASKS

Authors
YOSHIHARA T SUZUKI K
Citation
T. Yoshihara et K. Suzuki, SPUTTERING OF FIBROUS-STRUCTURED LOW-STRESS TA FILMS FOR X-RAY MASKS, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(6), 1994, pp. 4001-4004
Citations number
7
Categorie Soggetti
Physics, Applied
Journal title
Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena → ACNP
ISSN journal
10711023
Volume
12
Issue
6
Year of publication
1994
Pages
4001 - 4004
Database
ISI
SICI code
1071-1023(1994)12:6<4001:SOFLTF>2.0.ZU;2-Q