EXPERIMENTAL-DETERMINATION OF THE EFFECTIVE LITHOGRAPHIC CONTRAST FORX-RAY MASKS

Authors
MALDONADO JR
Citation
Jr. Maldonado, EXPERIMENTAL-DETERMINATION OF THE EFFECTIVE LITHOGRAPHIC CONTRAST FORX-RAY MASKS, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(6), 1994, pp. 4005-4008
Citations number
4
Categorie Soggetti
Physics, Applied
Journal title
Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena → ACNP
ISSN journal
10711023
Volume
12
Issue
6
Year of publication
1994
Pages
4005 - 4008
Database
ISI
SICI code
1071-1023(1994)12:6<4005:EOTELC>2.0.ZU;2-N