EVALUATION OF TEMPERATURE RISE AND THERMAL DISTORTIONS OF X-RAY MASK FOR SYNCHROTRON-RADIATION LITHOGRAPHY

Authors
YAMAZAKI K SATOH F FUJII K TANAKA Y YOSHIHARA T
Citation
K. Yamazaki et al., EVALUATION OF TEMPERATURE RISE AND THERMAL DISTORTIONS OF X-RAY MASK FOR SYNCHROTRON-RADIATION LITHOGRAPHY, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(6), 1994, pp. 4028-4032
Citations number
12
Categorie Soggetti
Physics, Applied
Journal title
Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena → ACNP
ISSN journal
10711023
Volume
12
Issue
6
Year of publication
1994
Pages
4028 - 4032
Database
ISI
SICI code
1071-1023(1994)12:6<4028:EOTRAT>2.0.ZU;2-9