HIGH GROWTH-RATE OF III-V COMPOUNDS BY FREE-CARRIER GAS CHEMICAL BEAMEPITAXY

Authors
BENCHIMOL JL JUHEL M PETITJEAN M ANCILOTTI A
Citation
Jl. Benchimol et al., HIGH GROWTH-RATE OF III-V COMPOUNDS BY FREE-CARRIER GAS CHEMICAL BEAMEPITAXY, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 13(1), 1995, pp. 55-58
Citations number
9
Categorie Soggetti
Physics, Applied
Journal title
Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena → ACNP
ISSN journal
10711023
Volume
13
Issue
1
Year of publication
1995
Pages
55 - 58
Database
ISI
SICI code
1071-1023(1995)13:1<55:HGOICB>2.0.ZU;2-K