X-RAY PHOTOELECTRON-SPECTROSCOPY AND ATOMIC-FORCE MICROSCOPY SURFACE STUDY OF GAAS(100) CLEANING PROCEDURES

Authors
SONG Z SHOGEN S KAWASAKI M SUEMUNE I
Citation
Z. Song et al., X-RAY PHOTOELECTRON-SPECTROSCOPY AND ATOMIC-FORCE MICROSCOPY SURFACE STUDY OF GAAS(100) CLEANING PROCEDURES, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 13(1), 1995, pp. 77-82
Citations number
16
Categorie Soggetti
Physics, Applied
Journal title
Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena → ACNP
ISSN journal
10711023
Volume
13
Issue
1
Year of publication
1995
Pages
77 - 82
Database
ISI
SICI code
1071-1023(1995)13:1<77:XPAAMS>2.0.ZU;2-K