MONOLAYER RESOLVED MONITORING OF ALAS GROWTH WITH METALORGANIC MOLECULAR-BEAM EPITAXY BY REFLECTANCE ANISOTROPY SPECTROSCOPY

Authors
RUMBERG J REINHARDT F RICHTER W FARRELL T ARMSTRONG J
Citation
J. Rumberg et al., MONOLAYER RESOLVED MONITORING OF ALAS GROWTH WITH METALORGANIC MOLECULAR-BEAM EPITAXY BY REFLECTANCE ANISOTROPY SPECTROSCOPY, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 13(1), 1995, pp. 88-91
Citations number
14
Categorie Soggetti
Physics, Applied
Journal title
Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena → ACNP
ISSN journal
10711023
Volume
13
Issue
1
Year of publication
1995
Pages
88 - 91
Database
ISI
SICI code
1071-1023(1995)13:1<88:MRMOAG>2.0.ZU;2-F