ELLIPSOMETRY STUDY OF THE NUCLEATION OF SI EPITAXY BY ELECTRON-CYCLOTRON-RESONANCE PLASMA CHEMICAL-VAPOR-DEPOSITION

Authors
LI M HU YZ IRENE EA LIU L CHRISTENSEN KN MAHER DM
Citation
M. Li et al., ELLIPSOMETRY STUDY OF THE NUCLEATION OF SI EPITAXY BY ELECTRON-CYCLOTRON-RESONANCE PLASMA CHEMICAL-VAPOR-DEPOSITION, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 13(1), 1995, pp. 105-110
Citations number
27
Categorie Soggetti
Physics, Applied
Journal title
Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena → ACNP
ISSN journal
10711023
Volume
13
Issue
1
Year of publication
1995
Pages
105 - 110
Database
ISI
SICI code
1071-1023(1995)13:1<105:ESOTNO>2.0.ZU;2-6