FABRICATION OF COLUMN-BASED SILICON FIELD EMITTER ARRAYS FOR ENHANCEDPERFORMANCE AND YIELD

Authors
TEMPLE D BALL CA PALMER WD YADON LN VELLENGA D MANCUSI J MCGUIRE GE GRAY HF
Citation
D. Temple et al., FABRICATION OF COLUMN-BASED SILICON FIELD EMITTER ARRAYS FOR ENHANCEDPERFORMANCE AND YIELD, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 13(1), 1995, pp. 150-157
Citations number
18
Categorie Soggetti
Physics, Applied
Journal title
Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena → ACNP
ISSN journal
10711023
Volume
13
Issue
1
Year of publication
1995
Pages
150 - 157
Database
ISI
SICI code
1071-1023(1995)13:1<150:FOCSFE>2.0.ZU;2-N