MICROWAVE SURFATRON SYSTEM FOR PLASMA PROCESSING

Authors
BARDOS L BARANKOVA H BERG S
Citation
L. Bardos et al., MICROWAVE SURFATRON SYSTEM FOR PLASMA PROCESSING, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 14(2), 1996, pp. 474-477
Citations number
11
Categorie Soggetti
Physics, Applied","Materials Science, Coatings & Films
Journal title
Journal of vacuum science & technology. A. Vacuum, surfaces, and films → ACNP
ISSN journal
07342101
Volume
14
Issue
2
Year of publication
1996
Pages
474 - 477
Database
ISI
SICI code
0734-2101(1996)14:2<474:MSSFPP>2.0.ZU;2-J