Deformation in Au/Ni strained multilayers has been characterised by HR
EM image processing. The HREM strain profile has been used to determin
e the Ni chemical profile in the structure, which is compared to the c
hemical profile obtained by scanning PEELS analysis through the multil
ayer. The structural evolution of the Au/Ni MBE multilayer grown with
an increasing number of Ni layers has been characterised. When the thi
ckness of Ni becomes larger than 5 monolayers, the growth is no longer
pseudo-morphological: a structural change occurs which has been shown
in numerical simulations too.