INTERFACE-TRAP EFFECT ON GATE INDUCED DRAIN LEAKAGE CURRENT IN SUBMICRON N-MOSFETS

An interface trap assisted tunneling mechanism which includes hole tun neling from interface traps to the valence band and electron tunneling from interface traps to the conduction band is presented to model the drain leakage current in a 0.5 mu m LATID N-MOSFET. In experiment, th e interface traps were generated by hot carrier stress, The increased drain leakage current due to the band-trap-band tunneling can be adequ ately described by an analytical expression of Delta I-d = A exp(-Bit/ F) with a value of B-it of 13 MV/cm, which is much lower than that (36 MV/cm) of direct band-to-band tunneling.