It is shown that, with proper use of an anti-scatter slit in front of
the detector, the signal-to-noise ratio of a symmetric high-resolution
X-ray diffraction scan can be improved by a factor of ten. By the use
of an asymmetric reflection with a high angle of incidence on the sam
ple, the size of the diffracted beam can be reduced sufficiently to al
low for two-dimensional reciprocal-space scans with a simple slit inst
ead of a crystal assembly in front of the detector for enhanced resolu
tion. By selection of the proper reflection, a resolution can be chose
n that suits the application. Examples include a partially relaxed SiG
e multilayer and a periodic surface grating.