ESTIMATION OF THE MINIMUM AND MAXIMUM SUBSTRATE TEMPERATURES FOR DIAMOND GROWTH FROM HYDROGEN HYDROCARBON-GAS MIXTURES

It is proposed in this paper that the minimum substrate temperature fo r diamond growth from hydrogen-hydrocarbon gas mixtures be determined by the packing arrangements of hydrocarbon fragments at the surface, a nd the maximum substrate temperature be limited by the diamond growth surface reconstruction, which can be prevented by saturating the surfa ce dangling bonds with atomic hydrogen. Theoretical calculations have been done by a formula proposed by Dryburgh [J. Crystal Growth 130 (19 93) 305], and the results show that diamond can be deposited at the su bstrate temperatures ranging from similar to 400 to similar to 1200 de grees C by low pressure chemical vapor deposition. This is consistent with experimental observations.