A 1-INCH 2-M PIXEL HDTV CCD IMAGE SENSOR WITH TUNGSTEN PHOTO-SHIELD AND H-CCD SHUNT WIRING

A 1-inch 2-million pixel FIT-CCD image sensor for HDTV has been develo ped, which features a tungsten photo-shield and horizontal CCD (H-CCD) shunt wiring. Tungsten photo-shield, which has low reflectance and go od step coverage characteristics, reduces smear level to -110 dB, comb ined with a frame-interline-transfer (FIT) scheme. The tungsten photo- shield also acts as a shunt busline, supplying transfer pulses to vert ical CCD (V-CCD) electrodes, so that a 1.2 x 10^5 electron charge hand ling capability is obtained at a frame transfer frequency of 1 MHz. Ne wly developed H-CCD shunt wiring suppresses vertical line pair FPN, ev en with smaller transfer pulse amplitudes. H-CCD shunt wiring also hel ps reduce power consumption in the H-CCD by 2/3 as compared to that ac hieved with conventional wiring.