ADSORPTION AND DECOMPOSITION OF TRICHLOROSILANE AND TRICHLOROGERMANE ON POROUS SILICON AND SI(100)2X1 SURFACES

Authors
DILLON AC WISE ML ROBINSON MB GEORGE SM
Citation
Ac. Dillon et al., ADSORPTION AND DECOMPOSITION OF TRICHLOROSILANE AND TRICHLOROGERMANE ON POROUS SILICON AND SI(100)2X1 SURFACES, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 13(1), 1995, pp. 1-10
Citations number
75
Categorie Soggetti
Physics, Applied","Materials Science, Coatings & Films
Journal title
Journal of vacuum science & technology. A. Vacuum, surfaces, and films → ACNP
ISSN journal
07342101
Volume
13
Issue
1
Year of publication
1995
Pages
1 - 10
Database
ISI
SICI code
0734-2101(1995)13:1<1:AADOTA>2.0.ZU;2-#