DIRECT ANALYSIS OF CONTAMINATION IN SUBMICRON CONTACT HOLES BY THERMAL-DESORPTION SPECTROSCOPY

Authors
AOKI H TERAOKA Y IKAWA E KIKKAWA T NISHIYAMA I
Citation
H. Aoki et al., DIRECT ANALYSIS OF CONTAMINATION IN SUBMICRON CONTACT HOLES BY THERMAL-DESORPTION SPECTROSCOPY, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 13(1), 1995, pp. 42-46
Citations number
6
Categorie Soggetti
Physics, Applied","Materials Science, Coatings & Films
Journal title
Journal of vacuum science & technology. A. Vacuum, surfaces, and films → ACNP
ISSN journal
07342101
Volume
13
Issue
1
Year of publication
1995
Pages
42 - 46
Database
ISI
SICI code
0734-2101(1995)13:1<42:DAOCIS>2.0.ZU;2-I