REAL-TIME MONITORING OF HOMOEPITAXIAL AND HETEROEPITAXIAL PROCESSES BY P-POLARIZED REFLECTANCE SPECTROSCOPY

Authors
DIETZ N MILLER A BACHMANN KJ
Citation
N. Dietz et al., REAL-TIME MONITORING OF HOMOEPITAXIAL AND HETEROEPITAXIAL PROCESSES BY P-POLARIZED REFLECTANCE SPECTROSCOPY, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 13(1), 1995, pp. 153-155
Citations number
4
Categorie Soggetti
Physics, Applied","Materials Science, Coatings & Films
Journal title
Journal of vacuum science & technology. A. Vacuum, surfaces, and films → ACNP
ISSN journal
07342101
Volume
13
Issue
1
Year of publication
1995
Pages
153 - 155
Database
ISI
SICI code
0734-2101(1995)13:1<153:RMOHAH>2.0.ZU;2-A