As the feature size of advanced bipolar junction transistors (BJTs) co
ntinues to scale down, the effects of nonuniform base doping, high-lev
el injection, current-induced base pushout, and velocity overshoot all
become prominent. These effects influence strongly the switching spee
d of the BJT as well as the gate delay of the BICMOS. We study in deta
il the base transit time tau(B), which is often the limiting factor of
the BJTs total delay time when the current density is high, and devel
op an analytical tau(B) model valid for arbitrary levels of injection
and Gaussian base doping profile. For the devices considered, our calc
ulations show that the conventional model (considers uniform base dopi
ng profile and no base pushout) overestimates tau(B) by a factor of ab
out 2.5 at low injection and underestimates tau(B) by a factor of abou
t 1.5 at high injection. The present model compares favorably with exp
erimental data measured from a 0.12 mu base width BJT.