METALORGANIC CHEMICAL-VAPOR-DEPOSITION GROWN ALGAAS LASERS WITH GROWNOPTICAL FACETS

AlGaAs double heterostructure laser diodes with grown optical window s tructure facets have been fabricated by single-step metalorganic chemi cal vapor deposition (MOCVD) growth on grooved substrates for the firs t time. We report a new technique which permits the simultaneous forma tion of optical feedback mirrors and a submicron-thick window region. [01 $$($) over bar 1]-oriented dovetail grooves on a GaAs(100) substra te were prepared by wet etching. The growth was carried out by atmosph eric-pressure MOCVD. The resulting broad area laser diode with a 0.3 m u m thick window region has a threshold current and slope efficiency s imilar to that of a laser diode with conventional cleaved facets. The light output power versus current characteristics were improved.