LOW-ENERGY-ELECTRON IMAGE CONVERTERS OF HIGH-RESOLUTION USING SLOW-SCAN CCD SENSOR

Citation
Kh. Herrmann et R. Sikeler, LOW-ENERGY-ELECTRON IMAGE CONVERTERS OF HIGH-RESOLUTION USING SLOW-SCAN CCD SENSOR, Optik, 98(3), 1995, pp. 119-124
Citations number
18
Categorie Soggetti
Optics
Journal title
OptikACNP
ISSN journal
00304026
Volume
98
Issue
3
Year of publication
1995
Pages
119 - 124
Database
ISI
SICI code
0030-4026(1995)98:3<119:LICOHU>2.0.ZU;2-2
Abstract
Electron image converters consisting of single-crystal scintillator, l ight-optics and slow-scan CCD (charge coupled device) have proven to b e suited for the low energy range below 10 keV provided the fundamenta ls of dimensioning are applied in a proper manner. After discussing th e dependence of the DQE (detection quantum efficiency) on the paramete rs of the components and on electron energy, it is shown by Monte Carl o simulation that even at 5 keV a satisfactory DQE of .6 can be obtain ed at a high resolution limited by the light-optics. Already below 50 keV a resolution of 1 mum was measured.