CHARACTERIZATION OF VAPOR-PHASE GROWTH USING X-RAY TECHNIQUES

Chemical vapor deposition environments, while technologically quite im portant, are difficult to study using traditional analytical probes, s uch as electron-based techniques and optical tools. In this work, we w ill describe some of the ways in which X-rays can be applied to unders tand not only the gas phase composition through fluorescence, but also surface processes such as nucleation and diffusion.