DEVELOPMENT OF ADVANCED MATHEMATICAL-MODELS FOR NUMERICAL-CALCULATIONS OF RADIATIVE HEAT-TRANSFER IN METALORGANIC CHEMICAL-VAPOR-DEPOSITIONREACTORS

The effect of radiative heat transfer in a horizontal chemical vapour deposition (CVD) reactor on the upper wall temperature is studied in d etail. A three-band model for the quartz absorption coefficient is int roduced and the wall emittance, reflectance, and transmittance are cal culated for the cases of specular and diffuse walls, and also for wall s covered by a film. Numerical simulation of the heat transfer in the horizontal reactor has shown that the upper wall temperature varies ab out up to 40-70 K depending on the type of the wall and the emissivity of the susceptor.