Using X-ray diffraction, transmission electron microscopy and low temp
erature photoluminescence, we investigated the interfacial strain acco
mmodation of the MBE grown thin (0.3-2 mu m) films of GaAs on (001)Si
substrates. When heavily As-doped Si buffer layers were used, the GaAs
-on-Si films displayed biaxial compression rather than tension and sma
ller unit-cell volumes as compared with that expected from elastically
compressed GaAs bulk single crystal. As a result of studying of the b
iaxial stress influence on the PL spectra of GaAs, we proposed a new i
dentification of PL bands in GaAs-on-Si. The effect of rapid and slow
thermal annealing is also investigated.